Compensation of phase change on reflection in white-light interferometry for step height measurement

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We present a method for compensating for the phase change on reflection in scanning white-light inteferometry that practically permits precise three-dimensional profile mapping of composite target surfaces that comprise multiple, dissimilar materials. The compensation method estimates the variation of phase change with the spectral distribution of the light source through a first-order approximation and then directly compensates for the measurement errors by performing two additional quasi-monochromatic phase-measuring interferometric measurements. Experimental results prove that the proposed compensation method is capable of reducing the measurement error in step height gauging to +/-5 nm or less. (C) 2001 Optical Society of America.
Publisher
OPTICAL SOC AMER
Issue Date
2001-04
Language
English
Article Type
Article
Keywords

INTERFEROGRAMS; INTERFERENCE; PROFILOMETRY

Citation

OPTICS LETTERS, v.26, no.7, pp.420 - 422

ISSN
0146-9592
URI
http://hdl.handle.net/10203/81728
Appears in Collection
ME-Journal Papers(저널논문)
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