FeRAM 소자 제작 중에 발생하는 Pt/Al 반응 기구A Study on Pt/Al Reaction Mechanism in the FeRAM Device Integration
- Publisher
- 한국재료학회
- Issue Date
- 2004-10
- Language
- Korean
- Citation
한국재료학회지, v.14, no.10, pp.688 - 695
- ISSN
- 1225-0562
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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