FeRAM 소자 제작 중에 발생하는 Pt/Al 반응 기구A Study on Pt/Al Reaction Mechanism in the FeRAM Device Integration

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Publisher
한국재료학회
Issue Date
2004-10
Language
Korean
Citation

한국재료학회지, v.14, no.10, pp.688 - 695

ISSN
1225-0562
URI
http://hdl.handle.net/10203/81051
Appears in Collection
MS-Journal Papers(저널논문)
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