Fabrications of Y-ZrO2 buffer layers of coated conductors using dc-sputtering

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The detailed conditions of dc-sputtering for depositions of yttria-stabilized ZrO (YSZ) films were investigated, while the films were grown on the CeO template layers on biaxially textured Ni-tapes. The window of oxygen pressures for proper growth of YSZ films, which was dependent on sputtering powers, was determined by sufficient oxidations of the YSZ films and the de-oxidation of the target surface, which was required for rapid sputtering. The window turned out to be fairly wide under certain values of argon pressure. When the sputtering power was raised, the deposition rate increased without narrowing the window. The fabricated YSZ films showed good texture qualities and surface morphologies.
Publisher
한국초전도.저온공학회
Issue Date
2003
Language
English
Citation

한국초전도.저온공학회논문지, v.5, no.3, pp.11 - 14

ISSN
1229-3008
URI
http://hdl.handle.net/10203/80550
Appears in Collection
PH-Journal Papers(저널논문)
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