나노 표면거칠기를 위한 SF-5유리와 수정유리의 ELID 연삭 특성에 관한 연구A Study on the ELID Grinding Characteristics of SF-5 Glass and Quartz Glass for the Nano Surface Roughness

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The precision fabrication of glass is increasingly demanded for the latest industrial applications of spherical lenses, micro-optical components, and so on. In many cases, the surface roughness of glass is required to be minute for improving the optical characteristics. In this paper, machining characteristics of SF-5 glass and quarts glass are studied by using the ELID grinding process to get mirror surface and productivity compared with a general lapping process. A rotary type grinder with air spindle was used for the experiments. Mitutoyo surface tester and AFM were also used to measure the grinded surface of glass. As the results of experiments, they showed that the surface roughness (Ra) of SF-5 glass was under 7.8 nm and that of quartz glass was under 3.0 m using the # 8000 grinder. So, the possibility of highly efficient and accurate surface for optical components can be achieved by the ELID grinding process.
Publisher
한국정밀공학회
Issue Date
2003-07
Language
Korean
Citation

한국정밀공학회지, v.20, no.7, pp.56 - 62

ISSN
1225-9071
URI
http://hdl.handle.net/10203/79539
Appears in Collection
ME-Journal Papers(저널논문)
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