Generation of Various Complex Patterned Structures From a Single Ellipsoidal Dot Prepattern by Capillary Force Lithography

Abstract

We report a novel method for creating many different complex structures from a single prepattern that is either prepared from a master mold or stamped onto a solid substrate by patterning with a poly(dimethylsiloxane) (PDMS) replica mold. We show that various metal patterns including ellipses, dots, rings, chains of dots (or rings), ribbons, and wavy lines with various feature sizes can be generated from a single pattern of isolated ellipsoidal dots by simply varying the residual polymer film thickness and the reactive ion etching (RIE) time.