감압화학증착의 이단계 성장으로 실리콘 기판 위에 증착한 in-situ 인 도핑 다결정 실리콘 박막의 미세구조 조절Manipulation of Microstructures of in-situ Phosphorus-Doped Poly Silicon Films Deposited on Silicon Substrate Using Two Step Growth of Reduced Pressure Chemical Vapor Deposition
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김홍승 | ko |
| dc.contributor.author | 심규환 | ko |
| dc.contributor.author | 이승윤 | ko |
| dc.contributor.author | 이정용 | ko |
| dc.contributor.author | 강진영 | ko |
| dc.date.accessioned | 2013-03-02T13:52:22Z | - |
| dc.date.available | 2013-03-02T13:52:22Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2000-12 | - |
| dc.identifier.citation | 전기전자재료학회논문지 , v.13, no.2, pp.95 - 100 | - |
| dc.identifier.issn | 1226-7945 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/73836 | - |
| dc.language | Korean | - |
| dc.publisher | 한국전기전자재료학회 | - |
| dc.title | 감압화학증착의 이단계 성장으로 실리콘 기판 위에 증착한 in-situ 인 도핑 다결정 실리콘 박막의 미세구조 조절 | - |
| dc.title.alternative | Manipulation of Microstructures of in-situ Phosphorus-Doped Poly Silicon Films Deposited on Silicon Substrate Using Two Step Growth of Reduced Pressure Chemical Vapor Deposition | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 13 | - |
| dc.citation.issue | 2 | - |
| dc.citation.beginningpage | 95 | - |
| dc.citation.endingpage | 100 | - |
| dc.citation.publicationname | 전기전자재료학회논문지 | - |
| dc.contributor.localauthor | 이정용 | - |
| dc.contributor.nonIdAuthor | 김홍승 | - |
| dc.contributor.nonIdAuthor | 심규환 | - |
| dc.contributor.nonIdAuthor | 이승윤 | - |
| dc.contributor.nonIdAuthor | 강진영 | - |
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