Dynamic modeling of a tunable microgyroscope

Abstract

The modeling of an electrostatically tunable microgyroscope is presented. The main structure of the microgyroscope developed consists of two micro-suspended plates driven by electrostatic combs in the antisymmetric tuning-fork mode. The natural frequency of the plates in the direction normal to the comb driving direction is tunable to match the frequencies of the gyroscope. Modeling and derivation of the dynamic properties of the model are discussed. The issues in this process are those commonly associated with the modeling and simulation of MEMS devices.