Deoxidization of iridium oxide thin film

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Deoxidization phenomenon of iridium oxide (IrO2) film, which has been used as a diffusion barrier for ferroelectric capacitors, is investigated changing the temperature and oxygen pressure during the post process. The deoxidization is well understood by explaining the relationship between the temperature and dissociation pressure according to the thermodynamics. A simple thermodynamic calculation for the deoxidization of IrO2 gives a guideline for successive process condition at which the stability of IrO2 films can be maintained.
Publisher
JAPAN J APPLIED PHYSICS
Issue Date
1999-10
Language
English
Article Type
Article
Keywords

ELECTRICAL-PROPERTIES; IR; ELECTRODES; CAPACITORS; STABILITY

Citation

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, v.38, no.10A, pp.1128 - 1130

ISSN
0021-4922
URI
http://hdl.handle.net/10203/72901
Appears in Collection
EE-Journal Papers(저널논문)
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