주파수 조정 방식의 미소 광 스위치용 실리콘 거울An Electrostatic Silicon Micromirror Device for Applications to Tunable Optomechanical Microswitches
- Publisher
- 대한전기학회
- Issue Date
- 1998-07
- Language
- Korean
- Citation
대한전기학회 논문지, v.47, no.7, pp.1051 - 1056
- ISSN
- 1975-8359
- Appears in Collection
- ME-Journal Papers(저널논문)BiS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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