Failure diagnosis and fault tolerant supervisory control system

Abstract

We propose in this paper a systematic way for analyzing discrete event dynamic systems to classify faults and Failures quantitatively and to find tolerable Fault event sequences embedded in the system. An automated failure diagnosis scheme with respect to the nominal normal operating event sequences and the supervisory control for tolerable fault event sequences are presented. Moreover the supervisor failure diagnosis with respect to the tolerable fault event sequences is considered. Finally, a case study of plasma etching system is described.