접합에 의한 대칭 질량형 실리콘 미소가속도계의 설계,제작 및 시험Design, Fabrication and Testing of a Silicon Microaccelerometer with a Symmetrically Bonded Proof-mass

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 434
  • Download : 0
This paper presents the design, batch-fabrication and testing of a piezoresistive cantilever beam microaccelerometer for automobile airbag applications. Silicon proof-mass has been bonded symmetrically for self-diagnostic capability and zero transverse sensitivity of the microaccelerometer. Microfabrication process, including a simple silicon etch-stop method for beam thickness control, has been developed for mass production lines. Fabricated devices show a resonant frequency of 2.15kHz and a sensitivity of 34μV/g/V with a nonlinearity of 2% at 100Hz. The present fabrication processes provide simple, practical and effective means for the reproducibility and mass production of the accelerometers.
Publisher
한국자동차공학회
Issue Date
1999-01
Language
Korean
Citation

한국자동차공학회 논문집, v.7, no.1, pp.155 - 160

ISSN
1225-6382
URI
http://hdl.handle.net/10203/71278
Appears in Collection
ME-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0