Effect of oxygen plasma treatment on hydrogen-damaged Pt/Pb(ZrxTi1-x)O-3/Pt ferroelectric thin-film capacitor

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Electron cyclotron resonance (ECR) oxygen plasma treatment of the Pt/Pb(ZrxTi1-x)O-3/Pt capacitor was attempted to reduce the property degradation due to hydrogen. It was found that oxygen plasma treatment using ECR modifies the surface of Pt electrodes. Surface modification deteriorates catalytic activity of Pt electrodes, thereby significantly improving ferroelectric properties such as remnant polarization and leakage current. It seems that highly reactive oxygen radicals in ECR plasma play an important role in deteriorating the catalytic activity of Pt electrodes.
Publisher
JAPAN J APPLIED PHYSICS
Issue Date
1999
Language
English
Article Type
Article
Keywords

DEGRADATION; PB(ZR,TI)O-3

Citation

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, v.38, no.5B, pp.L577 - L579

ISSN
0021-4922
DOI
10.1143/JJAP.38.L577
URI
http://hdl.handle.net/10203/69568
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