A one-dimensional model for a TCP discharge including the collisionless electron heating mechanism

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We present a one-dimensional model for a transformer-coupled plasma (TCP) discharge, which includes both the collisional and the collisionless heating mechanisms. We investigate the one-dimensional heating and the transport properties of a TCP discharge in a self-consistent manner. It is found that a critical behavior in power coupling appears as the reactor length is changed. Thus, it is concluded that the reactor length should be larger than a critical length to obtain a sufficient power.
Publisher
KOREAN PHYSICAL SOC
Issue Date
1996-10
Language
English
Article Type
Article
Keywords

COUPLED DISCHARGE; INDUCTION PLASMA; FLUID MODEL; SIMULATION

Citation

JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.29, no.5, pp.678 - 681

ISSN
0374-4884
URI
http://hdl.handle.net/10203/69055
Appears in Collection
PH-Journal Papers(저널논문)
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