고밀도 플라즈마 CVD 방법에 의한 TiN barrier metal 형성과 특성Characteristics of TiN Barrier Metal Prepared by High Density Plasma CVD Method
- Publisher
- 한국재료학회
- Issue Date
- 1999-12
- Language
- Korean
- Citation
한국재료학회지, v.9, no.11, pp.1129 - 1136
- ISSN
- 1225-0562
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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