A Machine Learning Approach to Yield Management in Semiconductor Manufacturing

Abstract

Yield improvement is one of the most important topics in semiconductor manufacturing. Traditional statistical methods are no longer feasible nor efficient, if possible, in analysing the vast amounts of data in a modern semiconductor manufacturing process. For instance, a typical wafer fabrication process has more than 1000 process parameters to record on a single wafer and one manufacturing plant may produce tens of thousands wafers a day. Traditional approaches have limits in extracting the full benefits of the data. Therefore, the manufacturing data is poorly exploited even in the most sophisticated processes. Now it is widely accepted that machine learning techniques can provide powerful tools for continuous quality improvement in a large and complex process such as semiconductor manufacturing. In this work, memory based reasoning (MBR) and neural network (NN) learning are combined for yield improvement and an integrated framework is proposed for a yield management system based on hybrid machine learning techniques. In this hybrid system of NN and MBR, the feature weight set which is calculated from the trained neural network plays the core role in connecting both learning strategies and the explanation on prediction can be given by obtaining and presenting the most similar examples from the case base. The proposed system has advantages in typical semiconductor manufacturing problems such as scalability to large datasets, high dimensions and adaptability to dynamic situations.