전자 싸이클로트론 공명 플라즈마 분석 및 박막균일성에 관한 연구

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Publisher
한국물리학회
Issue Date
1993
Language
Korean
Citation

응용물리, v.6, no.5, pp.414 - 420

URI
http://hdl.handle.net/10203/66590
Appears in Collection
PH-Journal Papers(저널논문)
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