Results 1-5 of 5 (Search time: 0.006 seconds).
NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
---|---|
Formation, evolution, and prevention of thermally induced defects on germanium and silicon upon high-temperature vacuum annealing Kim, Taeyeong; Jeong, Mungoung; Lee, Bong Jae; Lee, Jungchul, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.39, no.6, 2021-12 | |
Subsurface Imaging of Microfabricated Silicon Membrane-Cavity Structures Using Near-Infrared Interferometry Jeong, Mun Goung; Kim, Taeyeong; Lee, Bong Jae; Lee, Jungchul, ADVANCED ENGINEERING MATERIALS, v.24, no.10, 2022-10 | |
PCA-based sub-surface structure and defect analysis for germanium-on-nothing using nanoscale surface topography Jeong, Jaewoo; Kim, Taeyeong; Lee, Bong Jae; Lee, Jungchul, SCIENTIFIC REPORTS, v.12, no.1, 2022-05 | |
Surrogate model for optimizing annealing duration of self-assembled membrane-cavity structures Jeong, Mun Goung; Kim, Taeyeong; Lee, Bong Jae; Lee, Jungchul, MICRO AND NANO SYSTEMS LETTERS, v.10, no.1, 2022-06 | |
JMEMS Letters Thick Germanium-on-Nothing Structures by Annealing Microscale Hole Arrays With Straight Sidewall Profiles Jeong, Mun Goung; Kim, Taeyeong; Lee, Bong Jae; Lee, Jungchul, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.31, no.2, pp.183 - 185, 2022-04 |
Discover