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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Optimal design of a flexure hinge-based XYZ atomic force microscopy scanner for minimizing Abbe errors Kim, D; Kang, D; Shim, J; Song, I; Gweon, Dae-Gab, REVIEW OF SCIENTIFIC INSTRUMENTS, v.76, no.7, pp.376 - 391, 2005-07 |