Browse "ME-Journal Papers(저널논문)" by Author Saka, N.
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| Modeling and mitigation of pad scratching in chemical-mechanical polishing Kim, Sanha; Saka, N.; Chun, J. -H.; Shin, S. -H., CIRP ANNALS-MANUFACTURING TECHNOLOGY, v.62, no.1, pp.307 - 310, 2013 |
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