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Results 1-9 of 9 (Search time: 0.012 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Development of a dual inductively coupled plasma source for direct and remote plasma generation in a reactor

Uhm, S; Lee, KH; Chang, Hong-Young; Chung, CW, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS REVIEW PAPERS, v.44, no.2, pp.1081 - 1085, 2005-02

2
Power dissipation and mode transition in an RF discharge with multi-hollow cathode electrode

Lee, Yun-Seong; Lee, Hun-Su; Chang, Hong-Young, THIN SOLID FILMS, v.518, pp.6682 - 6685, 2010-09

3
The trend of electron temperature and electron density in the process of microcrystalline silicon solar cells

Lee, Yun-Seong; In, Jung-Hwan; Ahn, Seung-Kyu; Seo, Sang-Hun; Chang, Hong-Young; You, Dong-Joo; Ahn, Seh-Won; Lee, Heon-Min, CURRENT APPLIED PHYSICS, v.10, pp.S234 - S236, 2010-03

4
On a dual inductively coupled plasma for direct and remote plasma in a reactor

Uhm, S; Lee, KH; Chang, Hong-Young; Chung, CW, PHYSICS OF PLASMAS, v.11, pp.4830 - 4836, 2004-10

5
Electron transport in the downstream region of planar unbalanced magnetron discharge

Seo, SH; Chang, Hong-Young, JOURNAL OF APPLIED PHYSICS, v.96, pp.1310 - 1317, 2004-08

6
Anomalous behaviors of plasma parameters in unbalanced direct-current magnetron discharge

Seo, SH; Chang, Hong-Young, PHYSICS OF PLASMAS, v.11, pp.3595 - 3601, 2004-07

7
A study on the formation and characteristics of the Si-O-C-H composite thin films with low dielectric constant for advanced semiconductor devices

Yang, CS; Oh, KS; Ryu, JY; Kim, DC; Shou-Yong, J; Choi, CK; Lee, HJ; Um, SH; Chang, Hong-Young, THIN SOLID FILMS, v.390, no.1-2, pp.113 - 118, 2001-06

8
On the plasma uniformity of multi-electrode CCPs for large-area processing

Jung, Park Gi; Hoon, Seo Sang; Wook, Chung Chin; Chang, Hong-Young, PLASMA SOURCES SCIENCE & TECHNOLOGY, v.22, no.5, 2013-10

9
On the possibility of the multiple inductively coupled plasma and helicon plasma sources for large-area processes

Lee, Jinwon; Lee, Yun-Seong; Chang, Hong-Young; An, Sang-Hyuk, PHYSICS OF PLASMAS, v.21, no.8, 2014-08

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