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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Measurement of effective sheath width around cutoff probe in low-pressure plasmas Kim, Dongwook; You, S. J.; Kim, J. H.; Chang, Hong-Young; Oh, Wang-Yuhl, PHYSICS OF PLASMAS, v.21, no.5, 2014-05 | |
On the possibility of the multiple inductively coupled plasma and helicon plasma sources for large-area processes Lee, Jinwon; Lee, Yun-Seong; Chang, Hong-Young; An, Sang-Hyuk, PHYSICS OF PLASMAS, v.21, no.8, 2014-08 |
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