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Browse "PH-Journal Papers(저널논문)" by Author Chang, Hongyoung

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Showing results 1 to 13 of 13

1	A new inside-type segmented coil antenna for uniformity control in a large-area inductively coupled plasma Lee, Pyung-Woo; Kim, Sung-Sik; Seo, Sang-Hun; Chang, Choong-Seock; Chang, Hongyoung; Ichiki,Takanori; Horiike,Yasuhiro, JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, v.39, no.6A, pp.548 - 550, 2000-06
2	Characteristics of cylindrical plasma discharge with a thermal electron beam Bae, Inshik; Na, Byungkeun; Chang, Hongyoung, PHYSICS OF PLASMAS, v.23, no.9, pp.093513, 2016-09
3	Computational Characterization of a New Inductively Coupled Plasma Source for Application to Narrow Gap Plasma Processes Kim, Dae Woong; You, Shin Jae; Kim, Jung Hyun; Chang, Hongyoung; Oh, Wang-Yuhl, IEEE TRANSACTIONS ON PLASMA SCIENCE, v.43, no.11, pp.3876 - 3882, 2015-11
4	Computational comparative study of microwave probes for plasma density measurement Kim, Dae Woong; You, SJ; Kim, JH; Chang, Hongyoung; Oh, Wang-Yuhl, PLASMA SOURCES SCIENCE & TECHNOLOGY, v.25, no.3, pp.035026, 2016-06
5	Computational study on reliability of sheath width measurement by the cutoff probe in low pressure plasmas Kim, D. -W.; You, S. -J.; Kim, J. -H.; Seong, D. -J.; Chang, Hongyoung; Oh, Wang-Yuhl, JOURNAL OF INSTRUMENTATION, v.10, pp.1 - 7, 2015-11
6	Cutoff probe measurement in a magnetized plasma You, K. H.; You, S. J.; Na, B. K.; Kim, D. W.; Kim, J. H.; Seong, D. J.; Chang, Hongyoung, PHYSICS OF PLASMAS, v.25, no.1, 2018-01
7	Development of a high-speed impedance measurement system for dual-frequency capacitive-coupled pulsed-plasma Lee, Hohyoung; Lee, Jeongbeom; Park, Gijung; Han, Yunseok; Lee, Youngwook; Cho, Gunhee; Kim, Hanam; et al, REVIEW OF SCIENTIFIC INSTRUMENTS, v.86, no.8, pp.083505, 2015-08
8	Investigation of self-oscillation using particle balance model Bae, Inshik; Na, Byungkeun; Chang, Hongyoung, PHYSICS OF PLASMAS, v.22, no.8, pp.082101, 2015-08
9	Measurement and analysis of electron-neutral collision frequency in the calibrated cutoff probe You, KH; You, SJ; Kim, DW; Na, Byungkeun; Seo, BH; Kim, JH; Chang, Hongyoung, PHYSICS OF PLASMAS, v.23, no.3, pp.033509, 2016-03
10	Measurement of effective sheath width around the cutoff probe based on electromagnetic simulation Kim, Dae Woong; You, SJ; Kim, JH; Chang, Hongyoung; Yoon, JS; Oh, Wang-Yuhl, PHYSICS OF PLASMAS, v.23, no.5, pp.4945640, 2016-05
11	Measurement of electron density using reactance cutoff probe You, KH; You, SJ; Kim, Dae Woong; Na, Byungkeun; Seo, BH; Kim, JH; Seong, DJ; et al, PHYSICS OF PLASMAS, v.23, no.5, 2016-05
12	Study on OH Radical Production Depending on the Pulse Characteristics in an Atmospheric-Pressure Nanosecond-Pulsed Plasma Jet Seol, Youbin; Choi, Minsu; Chang, Hongyoung; You, Shinjae, MATERIALS, v.16, no.10, 2023-05
13	Study on SiN and SiCN film production using PE-ALD process with high-density multi-ICP source at low temperature Song, Hohyun; Seo, Sang Hun; Chang, Hongyoung, CURRENT APPLIED PHYSICS, v.18, no.11, pp.1436 - 1440, 2018-11

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