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NOVEL 3D FORCE SENSOR USING ULTRA-THIN SILICON STRAIN GAUGE BONDED ON METAL MEMBRANE Kim Y.D.; Lee C.S.; Kwon, Sejin, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, pp.1920 - 1923, IEEE, 2009-06-21 |
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