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| NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
|---|---|
| Modelling and analysis of semiconductor manufacturing in a shrinking world: challenges and successes Chien, CF; Dauzere-Peres, S; Ehm, H; Fowler, JW; Jiang, ZB; Krishnaswamy, S; Lee, Tae-Eog; Monch, L; Uzsoy, R, EUROPEAN JOURNAL OF INDUSTRIAL ENGINEERING, v.5, no.3, pp.254 - 271, 2011 | |
| SECAM: A Supervisory Equipment Control Application Model for Integrated Semiconductor Manufacturing Equipment, Lee, JH; Lee, Tae-Eog, IEEE ROBOTICS & AUTOMATION MAGAZINE, v.11, no.1, pp.41 - 58, 2004-03 | |
| Virtual control - A virtual cluster tool for testing and verifying a cluster tool controller and a scheduler Joo, YJ; Lee, Tae-Eog, IEEE ROBOTICS & AUTOMATION MAGAZINE, v.11, no.3, pp.33 - 49, 2004-09 |
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