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Results 1-3 of 3 (Search time: 0.006 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Wafer Delay Analysis and Workload Balancing of Parallel Chambers for Dual-Armed Cluster Tools With Multiple Wafer Types

Ko, Sung-Gil; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.18, no.3, pp.1516 - 1526, 2021-07

2
Adaptive Scheduling of Cluster Tools With Wafer Delay Constraints and Process Time Variation

Lim, Yuchul; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.17, no.1, pp.375 - 388, 2020-01

3
Integrated Scheduling of a Dual-Armed Cluster Tool for Maximizing Steady Schedule Patterns

Kim, Woojin; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON SYSTEMS, MAN, AND CYBERNETICS: SYSTEMS, v.51, no.12, pp.7282 - 7294, 2021-12

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