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Results 1-6 of 6 (Search time: 0.007 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Wafer delay analysis and control of dual-armed cluster tools with chamber cleaning operations

Yu, Tae-Sun; Lee, Tae-Eogresearcher, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.58, no.2, pp.434 - 447, 2020-01

2
Adaptive Scheduling of Cluster Tools With Wafer Delay Constraints and Process Time Variation

Lim, Yuchul; Yu, Tae-Sun; Lee, Tae-Eogresearcher, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.17, no.1, pp.375 - 388, 2020-01

3
Analysis of Backward Sequence for Single-Armed Cluster Tools With Processing Time Variations

Lee, Jun-Ho; Kim, Jun-Horesearcher, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.17, no.4, pp.2167 - 2174, 2020-10

4
Memory-Augmented Convolutional Neural Networks With Triplet Loss for Imbalanced Wafer Defect Pattern Classification

Hyun, Yunseung; Kim, Heeyoungresearcher, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.33, no.4, pp.622 - 634, 2020-11

5
Variational Deep Clustering of Wafer Map Patterns

Hwang, Jonghyun; Kim, Heeyoungresearcher, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.33, no.3, pp.466 - 475, 2020-08

6
Wafer Delay Analysis and Workload Balancing of Parallel Chambers for Dual-Armed Cluster Tools With Multiple Wafer Types

Ko, Sung-Gil; Yu, Tae-Sun; Lee, Tae-Eogresearcher, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.18, no.3, pp.1516 - 1526, 2021-07

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