Search

Start a new search
Current filters:
Add filters:
  • Results/Page
  • Sort items by
  • In order
  • Authors/record

Results 1-3 of 3 (Search time: 0.004 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Computer simulation of APCVD process for amorphous SiC thin film on silicon wafer

Koh, JH; Woo, Seong-Ihl, International Conference on VLSI and CAD, pp.248 - 251, 1989

2
Modelling and Simulation Study on Chemical Vapor Deposition Process for Silicon Carbide Film

Koh, JH; Woo, Seong-Ihl, The Conference on Semi-conductors, Materizals, Components and Computer Aided Design, pp.112 -, 1988

3
Modelling Study of Chemical Vapor Deposition Reaction

Koh, JH; Woo, Seong-Ihl, 한국화학공학회 추계학술발표회, 한국화학공학회, 1987-10

Discover

Type

Date issued

rss_1.0 rss_2.0 atom_1.0