스파터링 조건이 코발트계 합금의 박막 특성에 미치는 영향

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Publisher
대한금속재료학회
Issue Date
1986-01
Language
Korean
Citation

대한금속·재료학회지, v.24, no.12, pp.1316 - 1322

ISSN
1738-8228
URI
http://hdl.handle.net/10203/59800
Appears in Collection
MS-Journal Papers(저널논문)
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