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Showing results 1 to 9 of 9

1
Anomalous behaviors of plasma parameters in unbalanced direct-current magnetron discharge

Seo, SH; Chang, Hong-Young, PHYSICS OF PLASMAS, v.11, pp.3595 - 3601, 2004-07

2
Control of negative ion density in SF6/Ar capacitive discharges

You, SJ; Kim, SS; Chang, Hong-Young, PHYSICS OF PLASMAS, v.12, pp.317 - 324, 2005-08

3
Effects of a sheath boundary on electron energy distribution in Ar/He dc magnetron discharges

Seo, SH; In, JH; Chang, Hong-Young, JOURNAL OF APPLIED PHYSICS, v.96, pp.57 - 64, 2004-07

4
Effects of substrate bias on electron energy distribution in magnetron sputtering system

Seo, Sang-Hun; In, Jung-Hwan; Chang, Hong-Young; Han, Jeon-Geon, PHYSICS OF PLASMAS, v.11, no.10, pp.4796 - 4800, 2004-10

5
Electron drift and the loss balance of charged particles in planar-unbalanced dc magnetron discharge

Seo, SH; In, JH; Chang, Hong-Young, JOURNAL OF APPLIED PHYSICS, v.97, pp.335 - 347, 2005-01

6
Electron transport in the downstream region of planar unbalanced magnetron discharge

Seo, SH; Chang, Hong-Young, JOURNAL OF APPLIED PHYSICS, v.96, pp.1310 - 1317, 2004-08

7
Measurements of electron energy distribution functions and electron transport in the downstream region of an unbalanced dc magnetron discharge

Seo, SH; In, JH; Chang, Hong-Young, PLASMA SOURCES SCIENCE & TECHNOLOGY, v.13, no.3, pp.409 - 419, 2004-08

8
Measurements of Electron Energy Probability Functions in inductively coupled plasma with laser Thomson scattering

Seo, B. H.; You, S. J.; You, G. H.; Kim, J. H.; Yoo, Y. S.; Seong, D. J.; Chang, H. Y., JOURNAL OF INSTRUMENTATION, v.7, 2012-01

9
Study on SiN and SiCN film production using PE-ALD process with high-density multi-ICP source at low temperature

Song, Hohyun; Seo, Sang Hun; Chang, Hongyoung, CURRENT APPLIED PHYSICS, v.18, no.11, pp.1436 - 1440, 2018-11

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