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Showing results 1 to 5 of 5

1
A simple analysis on the abnormal behavior of the argon metastable density in an inductively coupled Ar plasma

Park, Min; Chang, Hong-Young; You, Shin-Jae; Kim, Jung-Hyung; Seong, Dae-Jin; Shin, Yong-Hyeon, THIN SOLID FILMS, v.518, pp.6694 - 6699, 2010-09

2
Experimental investigations of pulse-power-modulated inductive discharges

Seo, SH; Chang, Hong-Young; Yang, WC; Kwon, JH; Kim, DH; Kim, YY; Nam, JH; et al, JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.48, pp.414 - 421, 2006-03

3
Review of heating mechanism in inductively coupled plasma

Seo, SH; Chung, CW; Chang, Hong-Young, SURFACE COATINGS TECHNOLOGY, v.131, no.1-3, pp.1 - 11, 2000-09

4
Study on electron heating and E-H mode transition in planar inductively coupled plasma = 평판형 유도결합 플라즈마에서 전자 가열 및 E-H 모드 전이에 관한 연구link

Seo, Sang-Hun; 서상훈; et al, 한국과학기술원, 2000

5
그리드전압을 이용한 전자온도제어 및 $CF_4/Ar$ 플라즈마에의 응용에 관한 연구 = Study on controlling electron temperature with grid bias and Its application to $CF_4/Ar$ plasmalink

홍정인; Hong, Jung-In; et al, 한국과학기술원, 1999

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