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Improvements in electrical properties of (Ba,Sr)TiO3 capacitor with chemical vapor deposited Pt top electrode using Pt hexafluoroacetylacetonate

Lee, Jong Myeong; Kang, Sang Yeol; Shin, Ju Cheol; Kim, Wonjoonresearcher; Hwang, Cheol Seong; Kim, Hyeong Joon, APPLIED PHYSICS LETTERS, v.74, no.23, pp.3489 - 3491, 1999-06


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