증착조건이 Si 증착속도 및 증착층의 표면형상에 미치는 영향에 대한 연구 = Effect of deposition conditionson the deposition rate and the crystal morphology of silicon deposit

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 196
  • Download : 0
Advisors
천성순researcherChun, Sung-Soonresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1983
Identifier
63934/325007 / 000811267
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 재료공학과, 1983.2, [ [iv], 60 p. ]

Keywords

Surface reaction.; 표면 반응.; 열적 활성화 과정.

URI
http://hdl.handle.net/10203/51942
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=63934&flag=dissertation
Appears in Collection
MS-Theses_Master(석사논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0