증착조건이 Si 증착속도 및 증착층의 표면형상에 미치는 영향에 대한 연구Effect of deposition conditionson the deposition rate and the crystal morphology of silicon deposit
- Advisors
- 천성순researcher; Chun, Sung-Soonresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1983
- Identifier
- 63934/325007 / 000811267
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1983.2, [ [iv], 60 p. ]
- Keywords
Surface reaction.; 표면 반응.; 열적 활성화 과정.
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.