Room temperature fabricated ZnO thin film transistors with high-k $(Bi_1.5_}Zn_{1.0}Nb_{1.5}O_7)_{0.7}(MgO)_{0.3}$ gate insulators = 고유전$(Bi_1.5_}Zn_{1.0}Nb_{1.5}O_7)_{0.7}(MgO)_{0.3}$ 게이트 절연막을 이용하여 상온에서 제작된 ZnO 박막 트랜지스터에 관한 연구

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Low voltage organic TFTs (OTFTs) and ZnO based TFTs (<5V), utilizing room temperature deposited $Bi_{1.5}Zn_{1.0}Nb_{1.5}O_{7}$ (BZN) thin films were recently reported, pointing to high-k gate insulators as a promising route for realizing low voltage operating flexible electronics. $Bi_{1.5}Zn_{1.0}Nb_{1.5}O_{7}$ (BZN) thin film is one of the most promising materials for gate insulator because of its large dielectric constant (~60) at room temperature with an applied dc electric field. However their tendency to suffer from relatively high leakage current at low electric field (>0.3MV/cm) hinder the application of BZN thin films for gate insulator. In order to improve leakage current characteristics of BZN thin film, we mixed 30mol% MgO with 70mol% BZN and their dielectric and electric properties were characterized. We investigated the leakage current characteristic of $(Bi_{1.5}Zn_{1.0}Nb_{1.5}O_{7})_{0.7}(MgO)_{0.3}$ thin film and reported the results of the fabrication and characterization of thin film transistor using $(Bi_{1.5}Zn_{1.0}Nb_{1.5}O_{7})_{0.7}(MgO)_{0.3}$ gate insulator and ZnO active layer at room temperature by rf magnetron sputtering technique on PET and glass substrate. The devices exhibited low operation voltages (on PET, 1.2V and glass, 1.68V), high mobility (on PET, $20.4cm^2/V.s$ and glass, $35.3cm^2/V.s$) and also high on-off ratio (on PET, $6.45x10^5$ and glass, $1.88x10^5$).
Advisors
Kim, Ho-Giresearcher김호기researcher
Description
한국과학기술원 : 신소재공학과,
Publisher
한국과학기술원
Issue Date
2008
Identifier
296261/325007  / 020063548
Language
eng
Description

학위논문(석사) - 한국과학기술원 : 신소재공학과, 2008.2, [ iii, 88 p. ]

Keywords

high-k; TFT; BZN; ZnO; gate insulator; 고유전; 저전압; 박막트랜지스터; 게이트 절연막; 상온

URI
http://hdl.handle.net/10203/51848
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=296261&flag=dissertation
Appears in Collection
MS-Theses_Master(석사논문)
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