마스크 없는 Pendeo epitaxy 공정에 의한 저결함 GaN 박막의 미세구조 연구Microstructural characterization of the low dislocation density GaN films grown by maskless pendeo epitaxy
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이정용 | - |
| dc.contributor.advisor | Lee, Jeong-Yong | - |
| dc.contributor.author | 박동준 | - |
| dc.contributor.author | Park, Dong-Jun | - |
| dc.date.accessioned | 2011-12-15T01:46:21Z | - |
| dc.date.available | 2011-12-15T01:46:21Z | - |
| dc.date.issued | 2004 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=238318&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/51604 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 신소재공학과, 2004.2, [ iv, 100 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | GAN | - |
| dc.subject | GaN | - |
| dc.subject | EPITAXY | - |
| dc.subject | 박막 | - |
| dc.title | 마스크 없는 Pendeo epitaxy 공정에 의한 저결함 GaN 박막의 미세구조 연구 | - |
| dc.title.alternative | Microstructural characterization of the low dislocation density GaN films grown by maskless pendeo epitaxy | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 238318/325007 | - |
| dc.description.department | 한국과학기술원 : 신소재공학과, | - |
| dc.identifier.uid | 020023220 | - |
| dc.contributor.localauthor | 박동준 | - |
| dc.contributor.localauthor | Park, Dong-Jun | - |
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