마스크 없는 Pendeo epitaxy 공정에 의한 저결함 GaN 박막의 미세구조 연구Microstructural characterization of the low dislocation density GaN films grown by maskless pendeo epitaxy
- Advisors
- 이정용researcher; Lee, Jeong-Yongresearcher
- Description
- 한국과학기술원 : 신소재공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2004
- Identifier
- 238318/325007 / 020023220
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 신소재공학과, 2004.2, [ iv, 100 p. ]
- Keywords
GAN; GaN; EPITAXY; 박막
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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