RF 마그네트론 스퍼터링법에 의하여 증착한 ZnO 박막의 배향성에 관한 연구A study of the preferred orientation of ZnO thin films deposited by RF magnetron sputtering

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Advisors
이정용researcherLee, Jeong-Yongresearcher
Description
한국과학기술원 : 전자재료공학과,
Publisher
한국과학기술원
Issue Date
1994
Identifier
69522/325007 / 000923115
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1994.2, [ 66 p. ]

Keywords

고분해능 투과 전자 현미경

URI
http://hdl.handle.net/10203/51252
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=69522&flag=dissertation
Appears in Collection
MS-Theses_Master(석사논문)
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