CVD로 제조한 SiC 증착층의 미세구조에 관한 연구A study on the microstructure of SiC deposited by chemical vapor deposition
- Advisors
- 이재영; Lee, Jai-Young
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1988
- Identifier
- 66479/325007 / 000861153
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1988.2, [ [iv], 54 p. ]
- Keywords
Deposition parameter.; 탄화규소.
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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