마그네트론 스퍼터링에서의 타겟 식각 및 박막 증착에 관한 연구 = Study on the target erosion and film deposition in magnetron sputtering system

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dc.contributor.advisor이원종-
dc.contributor.advisorLee, Won-Jong-
dc.contributor.author최선희-
dc.contributor.authorChoi, Sun-Hee-
dc.date.accessioned2011-12-15T01:35:16Z-
dc.date.available2011-12-15T01:35:16Z-
dc.date.issued2003-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=180282&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/50918-
dc.description학위논문(석사) - 한국과학기술원 : 재료공학과, 2003.2, [ viii, 82 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.subject스퍼터링-
dc.subjectSputtering-
dc.title마그네트론 스퍼터링에서의 타겟 식각 및 박막 증착에 관한 연구 = Study on the target erosion and film deposition in magnetron sputtering system-
dc.typeThesis(Master)-
dc.identifier.CNRN180282/325007-
dc.description.department한국과학기술원 : 재료공학과, -
dc.identifier.uid020013606-
dc.contributor.localauthor이원종-
dc.contributor.localauthorLee, Won-Jong-
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MS-Theses_Master(석사논문)
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