MEMS 용 구리 박막 재료의 기계적 물성 평가 및 해석Mechanical properties of Cu thin films for MEMS applications
- Advisors
- 홍순형researcher; Hong, Soon-Hyungresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2003
- Identifier
- 180278/325007 / 020013101
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 2003.2, [ viii, 82 p. ]
- Keywords
구리 박막 재료; 미세전자기계시스템; 기계적 물성 평가; mechanical properties; Cu thin films; Micro-electro-mechanical systems
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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