강유전체 랜덤 억세스 메모리(FRAM)용 Pt/Ti 전극에서 Pt hillock 생성기구Pt hillock formation mechanism of Pt/Ti electrode for ferroelectric random access memory
- Advisors
- 최시경researcher; Choi, Si-Kyungresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2002
- Identifier
- 177063/325007 / 020013556
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 2002.8, [ iii, 55 p. ]
- Keywords
Pt hiilock 생성기구; Pt hillock formation mechanism
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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