반응성 스퍼터링법에 의한 $Pb(Zr,Ti)O_3$ 압전 박막의 제조 및 특성평가 = Preparation and characterization of $Pb(Zr,Ti)O_3$ piezoelectric thin films by reactive sputtering

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Advisors
이원종researcherLee, Won-Jongresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
2001
Identifier
166044/325007 / 000993769
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 재료공학과, 2001.2, [ ix, 85 p. ]

Keywords

페롭스카이트; 스퍼터링; 잔류 응력; 압전; PZT; perovskite; sputtering; residual stress; piezoelectric

URI
http://hdl.handle.net/10203/50837
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=166044&flag=dissertation
Appears in Collection
MS-Theses_Master(석사논문)
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