DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 최시경 | - |
dc.contributor.advisor | Choi, Si-Kyung | - |
dc.contributor.author | 이정일 | - |
dc.contributor.author | Lee, Jung-Il | - |
dc.date.accessioned | 2011-12-15T01:33:07Z | - |
dc.date.available | 2011-12-15T01:33:07Z | - |
dc.date.issued | 2000 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=158616&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/50789 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 2000.2, [ iv, 74 p. ] | - |
dc.language | kor | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | 밀도 | - |
dc.subject | 응력 | - |
dc.subject | 산화물 전극 | - |
dc.subject | 마그네트론 스퍼터링 | - |
dc.subject | Magnetron sputtering | - |
dc.subject | Density | - |
dc.subject | Stress | - |
dc.subject | ITO | - |
dc.title | D.C. 마그네트론 반응성 스퍼터링법으로 증착한 ITO박막에 있어서 고유응력, 배향성 그리고 밀도가 비저항에 미치는 영향 | - |
dc.title.alternative | Effect of density, intrinsic stress and crystallographic orientation on resistivity of ITO thin films deposited by D.C. magnetron reactive sputtering | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 158616/325007 | - |
dc.description.department | 한국과학기술원 : 재료공학과, | - |
dc.identifier.uid | 000983444 | - |
dc.contributor.localauthor | 최시경 | - |
dc.contributor.localauthor | Choi, Si-Kyung | - |
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