ECR PECVD에 의한 다이아몬드 막의 식각특성에 관한 연구A study on the etching characteristics of diamond film by ECR PECVD
- Advisors
- 유진researcher; Yu, Jinresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1999
- Identifier
- 150089/325007 / 000973643
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1999.2, [ iii, 64 p. ]
- Keywords
식각; 다이아몬드; ECR; Etching; Diamond
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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