상부 전극 증착 조건이 $Pb(Zr,Ti)O_3$ 박막의 전기적 특성에 미치는 영향 = The effects of deposition conditions of top elctrodes on the electrical properties of $Pb(Zr,Ti)O_3$ thin films

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Advisors
이원종researcherLee, Won-Jongresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1999
Identifier
150054/325007 / 000963420
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 재료공학과, 1999.2, [ ix, 87 p. ]

Keywords

백금; 상부 전극; PZT 박막; 강유전체; 수소 유기 열화; Hydrogen-induced degradation; Pt; Top electrode; PZT film; Ferroelectrics

URI
http://hdl.handle.net/10203/50708
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=150054&flag=dissertation
Appears in Collection
MS-Theses_Master(석사논문)
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