DSpace at KOASAS: DC magnetron sputtering법을 이용한 Ir 하부전극의 형성 및 특성평가와 $(Ba,Sr)TiO

DSpace at KOASAS

College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Theses_Master(석사논문)

DC magnetron sputtering법을 이용한 Ir 하부전극의 형성 및 특성평가와 $(Ba,Sr)TiO_3$ 박막의 특성 평가Preparation and characterization of iridium bottom electrode by DC magnetron sputtering and characterization of $(Ba,Sr)TiO_3$ thin film

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박정호 / Park, Jeong-Ho

Advisors: 김호기 researcher; Kim, Ho-Gi researcher

Description: 한국과학기술원 : 재료공학과,

Publisher: 한국과학기술원

Issue Date: 1998

Identifier: 133545/325007 / 000963260

Language: kor

Description: 학위논문(석사) - 한국과학기술원 : 재료공학과, 1998.2, [ 91 p. ]

Keywords: Ir bottom electrode; DC magnetron sputtering; BST; I-V; C-V; Different substrates

URI: http://hdl.handle.net/10203/50675

Link: http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=133545&flag=dissertation

Appears in Collection: MS-Theses_Master(석사논문)

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DC magnetron sputtering법을 이용한 Ir 하부전극의 형성 및 특성평가와 $(Ba,Sr)TiO_3$ 박막의 특성 평가Preparation and characterization of iridium bottom electrode by DC magnetron sputtering and characterization of $(Ba,Sr)TiO_3$ thin film

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