Cyclic CVD 법으로 증착된 TiN 박막의 증착 기구와 특성에 관한 연구A study on deposition mechanism and characteristics of TiN thin films deposited by Cyclic CVD
- Advisors
- 강상원researcher; Kang, Sang-Wonresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1997
- Identifier
- 114932/325007 / 000953288
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1997.2, [ [iv], 67 p. ]
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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