반응성 스퍼터링법으로 제조한 $PbTiO_3$ 박막의 응력분포에 따른 배향성의 변화에 관한 연구A study on stress distribution dependence of orientation ratio in $PbTiO_3$ thin film deposited by reactive sputtering
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1997
- Identifier
- 113158/325007 / 000953615
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1997.2, [ iv, 98 p. ]
- Keywords
분역구조; 스퍼터링; 응력 분포; 배향도; 유한요소 해석법; FEM; Domain structure; Sputtering; Stress distribution; Orientation ratio
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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