DC magnetron sputtering으로 증착한 Cr 산화물 박막의 두께 균일도 및 광학적인 특성 분석 = Analysis on thickness uniformity and optical properties of chromium oxide thin films deposited by DC magnetron sputtering

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Advisors
노광수researcherNo, Kwang-Sooresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1996
Identifier
106621/325007 / 000943585
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 재료공학과, 1996.2, [ iv, 71 p. ]

Keywords

메쉬; 흡수계수; 투광성; 위상변이 마스크; 광학적인 성질; 마그네트론; 스퍼터링; 균일도; 산화물; 크롬; Cr; Transmittance; Absorbance; Mesh; Phase shifting mask; Band gap; Optical properties; Chromium oxide; Uniformity; Sputtering; Magnetron

URI
http://hdl.handle.net/10203/50609
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=106621&flag=dissertation
Appears in Collection
MS-Theses_Master(석사논문)
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