D.C.Magnetron reactive sputtering법으로 증착한 $PbTiO_3$ 박막의 c축 배향성에 미치는 고유웅력의 영향Intrinsic stress dependence of c-axis orientation of $PbTiO_3$ thin films by D.C. magnetron reactive sputtering

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dc.contributor.advisor최시경-
dc.contributor.advisorChoi, Si-Kyung-
dc.contributor.author이승현-
dc.contributor.authorYi, Seung-Hyun-
dc.date.accessioned2011-12-15T01:30:05Z-
dc.date.available2011-12-15T01:30:05Z-
dc.date.issued1996-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=106618&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/50606-
dc.description학위논문(석사) - 한국과학기술원 : 재료공학과, 1996.2, [ 88 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.titleD.C.Magnetron reactive sputtering법으로 증착한 $PbTiO_3$ 박막의 c축 배향성에 미치는 고유웅력의 영향-
dc.title.alternativeIntrinsic stress dependence of c-axis orientation of $PbTiO_3$ thin films by D.C. magnetron reactive sputtering-
dc.typeThesis(Master)-
dc.identifier.CNRN106618/325007-
dc.description.department한국과학기술원 : 재료공학과, -
dc.identifier.uid000943403-
dc.contributor.localauthor최시경-
dc.contributor.localauthorChoi, Si-Kyung-
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MS-Theses_Master(석사논문)
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