텅스텐 박막의 저압화학 증착 기구 및 증착층의 특성에 관한 연구A study on the mechanisms of tungsten low pressure chemical vapor deposition and the characteristics of the deposited layer
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 천성순 | - |
| dc.contributor.advisor | 남수우 | - |
| dc.contributor.advisor | Chun, Soung-Soon | - |
| dc.contributor.advisor | Nam, Soo-Woo | - |
| dc.contributor.author | 박흥락 | - |
| dc.contributor.author | Park, Heung-Lak | - |
| dc.date.accessioned | 2011-12-15T01:05:18Z | - |
| dc.date.available | 2011-12-15T01:05:18Z | - |
| dc.date.issued | 1989 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=61389&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50319 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 1989.2, [ [v], 134 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | Low pressure chemical vapor deposition. | - |
| dc.title | 텅스텐 박막의 저압화학 증착 기구 및 증착층의 특성에 관한 연구 | - |
| dc.title.alternative | A study on the mechanisms of tungsten low pressure chemical vapor deposition and the characteristics of the deposited layer | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 61389/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000845136 | - |
| dc.contributor.localauthor | 박흥락 | - |
| dc.contributor.localauthor | Park, Heung-Lak | - |
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- MS-Theses_Ph.D.(박사논문)
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